Granted Patent
Utility
US 6,475,335 · App. 09/658,572
RF plasma reactor with hybrid conductor and multi-radius dome ceiling
Inventors:
Gerald Yin, Diana Xiabing Ma, Peter Loewenhardt, Philip M. Salzman, Allen Zhao, Hiroji Hanawa
Patented Case
View Patent ↗
Granted: Nov 5, 2002
Filed: Sep 8, 2000
Inventors
Gerald Yin
Diana Xiabing Ma
Peter Loewenhardt
Philip M. Salzman
Allen Zhao
Hiroji Hanawa
Assignee (at issue)
Applied Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.