Granted Patent
Utility
US 6,475,398 · App. 09/962,430
Semiconductor device incorporating hemispherical solid immersion lens, apparatus and method for manufacturing same
Inventor:
Hideki Kitahata
Patented Case
View Patent ↗
Granted: Nov 5, 2002
Filed: Sep 25, 2001
Inventor
Hideki Kitahata
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.