Granted Patent
Utility
US 6,475,815 · App. 09/456,381
Method of measuring temperature, method of taking samples for temperature measurement and method for fabricating semiconductor device
Inventors:
Yuko Nambu, Satoshi Shibata
Patented Case
View Patent ↗
Granted: Nov 5, 2002
Filed: Dec 8, 1999
Inventors
Yuko Nambu
Satoshi Shibata
Assignee (at issue)
SUMITOMO ELECTRIC INDUSTRIES, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.