Granted Patent
Utility
US 6,475,822 · App. 09/752,853
Method of making microelectronic contact structures
Inventors:
Benjamin N. Eldridge, Gary W. Grube, Igor Y. Khandros, Gaetan L. Mathieu
Patented Case
View Patent ↗
Granted: Nov 5, 2002
Filed: Dec 29, 2000
Inventors
Benjamin N. Eldridge
Gary W. Grube
Igor Y. Khandros
Gaetan L. Mathieu
Assignee (at issue)
FormFactor, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.