Granted Patent
Utility
US 6,475,864 · App. 09/694,098
Method of manufacturing a super-junction semiconductor device with an conductivity type layer
Inventors:
Takahiro Sato, Katsunori Ueno, Tatsuhiko Fujihira, Kenji Kunihara, Yasuhiko Onishi, Susumu Iwamoto
Patented Case
View Patent ↗
Granted: Nov 5, 2002
Filed: Oct 23, 2000
Inventors
Takahiro Sato
Katsunori Ueno
Tatsuhiko Fujihira
Kenji Kunihara
Yasuhiko Onishi
Susumu Iwamoto
Assignee (at issue)
FUJI ELECTRIC CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.