Granted Patent
Utility
US 6,475,910 · App. 09/669,063
Radical-assisted sequential CVD
Inventor:
Ofer Sneh
Patented Case
View Patent ↗
Granted: Nov 5, 2002
Filed: Sep 22, 2000
Inventor
Ofer Sneh
Assignee (at issue)
Genus, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.