Granted Patent
Utility
US 6,475,919 · App. 09/753,589
Method for producing trenches for DRAM cell configurations
Inventors:
Lothar Brencher, Maik Stegememann, Uwe Rudolph
Patented Case
View Patent ↗
Granted: Nov 5, 2002
Filed: Jan 3, 2001
Inventors
Lothar Brencher
Maik Stegememann
Uwe Rudolph
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.