Granted Patent
Utility
US 6,475,928 · App. 09/115,706
Process for depositing a Ta2O5 dielectric layer
Inventors:
Marc Berenguer, Roderick A. B. Devine
Patented Case
View Patent ↗
Granted: Nov 5, 2002
Filed: Jul 15, 1998
Inventors
Marc Berenguer
Roderick A. B. Devine
Assignee (at issue)
FRANCE TELECOM
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.