Granted Patent
Utility
US 6,477,225 · App. 09/636,002
X-ray mask and method for providing same
Inventors:
Alfredo M. Morales, Dawn M. Skala
Patented Case
View Patent ↗
Granted: Nov 5, 2002
Filed: Aug 9, 2000
Inventors
Alfredo M. Morales
Dawn M. Skala
Assignee (at issue)
Sandia National Laboratory
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.