Granted Patent
Utility
US 6,479,210 · App. 09/445,345
Chemically amplified resist composition
Inventors:
Yoshiaki Kinoshita, Satoru Funato, Yuko Yamaguchi
Patented Case
View Patent ↗
Granted: Nov 12, 2002
Filed: Apr 3, 2000
Inventors
Yoshiaki Kinoshita
Satoru Funato
Yuko Yamaguchi
Assignee (at issue)
Clariant Finance (BVI) Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.