Granted Patent
Utility
US 6,479,320 · App. 09/496,826
Vacuum package fabrication of microelectromechanical system devices with integrated circuit components
Inventor:
Roland W. Gooch
Patented Case
View Patent ↗
Granted: Nov 12, 2002
Filed: Feb 2, 2000
Inventor
Roland W. Gooch
Assignee (at issue)
Raytheon Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.