Granted Patent
Utility
US 6,479,396 · App. 09/794,055
Dry polymer and oxide veil removal for post etch cleaning
Inventors:
Han Xu, Amy Shen, Phillip Clark
Patented Case
View Patent ↗
Granted: Nov 12, 2002
Filed: Feb 28, 2001
Inventors
Han Xu
Amy Shen
Phillip Clark
Assignee (at issue)
Infineon Technologies Richmond, LP
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.