Granted Patent
Utility
US 6,479,821 · App. 09/659,094
Thermally induced phase switch for laser thermal processing
Inventors:
Andrew M. Hawryluk, Somit Talwar, Yun Wang, David A. Markle, Michael O. Thompson
Patented Case
View Patent ↗
Granted: Nov 12, 2002
Filed: Sep 11, 2000
Inventors
Andrew M. Hawryluk
Somit Talwar
Yun Wang
David A. Markle
Michael O. Thompson
Assignee (at issue)
Ultratech Stepper, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.