Granted Patent
Utility
US 6,479,879 · App. 09/753,809
Low defect organic BARC coating in a semiconductor structure
Inventors:
Christopher Lee Pike, Alexander H. Nickel
Patented Case
View Patent ↗
Granted: Nov 12, 2002
Filed: Jan 3, 2001
Inventors
Christopher Lee Pike
Alexander H. Nickel
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.