Granted Patent
Utility
US 6,479,902 · App. 09/609,013
Semiconductor catalytic layer and atomic layer deposition thereof
Inventors:
Sergey Lopatin, Carl Galewski
Patented Case
View Patent ↗
Granted: Nov 12, 2002
Filed: Jun 29, 2000
Inventors
Sergey Lopatin
Carl Galewski
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.