Granted Patent
Utility
US 6,482,569 · App. 09/572,203
Process for forming a polyimide pattern with photosensitive composition for i-line stepper
Inventors:
Yoshio Matsuoka, Kanichi Yokota, Yasuhiro Kataoka
Patented Case
View Patent ↗
Granted: Nov 19, 2002
Filed: May 17, 2000
Inventors
Yoshio Matsuoka
Kanichi Yokota
Yasuhiro Kataoka
Assignee (at issue)
ASAHI KASEI KABUSHIKI KAISHA
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.