Granted Patent
Utility
US 6,484,306 · App. 09/466,730
Multi-level scanning method for defect inspection
Inventors:
Jeffrey Bokor, Seongtae Jeong
Patented Case
View Patent ↗
Granted: Nov 19, 2002
Filed: Dec 17, 1999
Inventors
Jeffrey Bokor
Seongtae Jeong
Assignee (at issue)
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.