Granted Patent
Utility
US 6,484,307 · App. 09/811,867
Method for fabricating and checking structures of electronic circuits in a semiconductor substrate
Inventors:
Jürgen Karl, Martin Zibert, Valentin Rosskopf
Patented Case
View Patent ↗
Granted: Nov 19, 2002
Filed: Mar 19, 2001
Inventors
Jürgen Karl
Martin Zibert
Valentin Rosskopf
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.