Granted Patent
Utility
US 6,485,253 · App. 09/875,420
Edge gripped substrate loading and unloading method
Inventors:
Joseph T. Adams, Robert S. Kearns
Patented Case
View Patent ↗
Granted: Nov 26, 2002
Filed: Jun 5, 2001
Inventors
Joseph T. Adams
Robert S. Kearns
Assignee (at issue)
Nanometrics Incorporated
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.