Granted Patent
Utility
US 6,485,355 · App. 09/887,790
Method to increase removal rate of oxide using fixed-abrasive
Inventors:
Laertis Economikos, Alexander William Simpson
Patented Case
View Patent ↗
Granted: Nov 26, 2002
Filed: Jun 22, 2001
Inventors
Laertis Economikos
Alexander William Simpson
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.