Granted Patent
Utility
US 6,485,604 · App. 09/391,062
Substrate processing apparatus
Inventors:
Satohiro Okayama, Kenji Etoh
Patented Case
View Patent ↗
Granted: Nov 26, 2002
Filed: Sep 7, 1999
Inventors
Satohiro Okayama
Kenji Etoh
Assignee (at issue)
KOKUSAI ELECTRIC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.