Granted Patent
Utility
US 6,486,049 · App. 09/845,600
Method of fabricating semiconductor devices with contact studs formed without major polishing defects
Inventors:
John Maltabes, Hans Zeindl
Patented Case
View Patent ↗
Granted: Nov 26, 2002
Filed: Apr 30, 2001
Inventors
John Maltabes
Hans Zeindl
Assignees (at issue)
Motorola, Inc.
Semiconductor 300 GmbH & Co. KG
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.