Granted Patent
Utility
US 6,486,069 · App. 09/454,814
Cobalt silicide etch process and apparatus
Inventors:
Steven Marks, Leslie G. Jerde, Stephen P. DeOrnellas
Patented Case
View Patent ↗
Granted: Nov 26, 2002
Filed: Dec 3, 1999
Inventors
Steven Marks
Leslie G. Jerde
Stephen P. DeOrnellas
Assignee (at issue)
TEGAL CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.