Granted Patent
Utility
US 6,486,478 · App. 09/731,688
Gas cluster ion beam smoother apparatus
Inventors:
Bruce K. Libby, Isao Yamada, James A. Greer, Lester G. Crawford, James G. Bachand, Matthew C. Gwinn, Richard Torti
Patented Case
View Patent ↗
Granted: Nov 26, 2002
Filed: Dec 6, 2000
Inventors
Bruce K. Libby
Isao Yamada
James A. Greer
Lester G. Crawford
James G. Bachand
Matthew C. Gwinn
Richard Torti
Assignee (at issue)
Epion Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.