Granted Patent
Utility
US 6,486,682 · App. 09/904,736
Determination of dielectric constants of thin dielectric materials in a MOS (metal oxide semiconductor) stack
Inventors:
Zhigang Wang, Nian Yang, Tien-Chun Yang
Patented Case
View Patent ↗
Granted: Nov 26, 2002
Filed: Jul 13, 2001
Inventors
Zhigang Wang
Nian Yang
Tien-Chun Yang
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.