Granted Patent
Utility
US 6,486,956 · App. 09/816,861
Reducing asymmetrically deposited film induced registration error
Inventors:
Erik Byers, Steve W. Bowes
Patented Case
View Patent ↗
Granted: Nov 26, 2002
Filed: Mar 23, 2001
Inventors
Erik Byers
Steve W. Bowes
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.