Granted Patent
Utility
US 6,487,307 · App. 09/262,603
System and method of optically inspecting structures on an object
Inventors:
Kathleen Hennessey, Youling Lin
Patented Case
View Patent ↗
Granted: Nov 26, 2002
Filed: Mar 4, 1999
Inventors
Kathleen Hennessey
Youling Lin
Assignee (at issue)
ISOA, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.