Granted Patent
Utility
US 6,487,744 · App. 09/946,850
Device for cleaning a wafer of abrasive agent suspension remaining after polishing with brushes and DI water
Inventor:
Rudiger Hunger
Patented Case
View Patent ↗
Granted: Dec 3, 2002
Filed: Sep 4, 2001
Inventor
Rudiger Hunger
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.