Granted Patent
Utility
US 6,488,021 · App. 09/695,773
Method and apparatus for producing semiconductor element
Inventors:
Keiji Yamane, Hideto Adachi, Akira Takamori
Patented Case
View Patent ↗
Granted: Dec 3, 2002
Filed: Oct 25, 2000
Inventors
Keiji Yamane
Hideto Adachi
Akira Takamori
Assignee (at issue)
Matsushita Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.