Granted Patent
Utility
US 6,489,067 · App. 09/835,516
Reticle for manufacturing semiconductor integrated circuit
Inventor:
Masanobu Soenosawa
Patented Case
View Patent ↗
Granted: Dec 3, 2002
Filed: Apr 17, 2001
Inventor
Masanobu Soenosawa
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.