Granted Patent
Utility
US 6,489,181 · App. 09/897,408
Method of manufacturing a semiconductor device
Inventors:
Yoshiyuki Kado, Tsukio Funaki, Hiroshi Kikuchi, Ikuo Yoshida
Patented Case
View Patent ↗
Granted: Dec 3, 2002
Filed: Jul 3, 2001
Inventors
Yoshiyuki Kado
Tsukio Funaki
Hiroshi Kikuchi
Ikuo Yoshida
Assignees (at issue)
HITACHI, LTD.
Hitachi Hokkai Semiconductor Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.