IP Library Granted Patent US 6,489,193
Granted Patent Utility
US 6,489,193 · App. 10/040,442

Process for device isolation

Inventors: Lung-Wen Chen, Teng-Feng Wang, Zen-Long Yang, Shih-Hui Chang, Yung-Shin Wang
Patented Case View Patent ↗
Granted: Dec 3, 2002 Filed: Jan 9, 2002
Inventors
Lung-Wen Chen
Teng-Feng Wang
Zen-Long Yang
Shih-Hui Chang
Yung-Shin Wang
Assignee (at issue)
Silicon Integrated Systems Corp.

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Quick Facts
Patent No.
US 6,489,193
App. No.
10/040,442
Filed
2002-01-09
Granted
2002-12-03
Kind
B1