Granted Patent
Utility
US 6,489,249 · App. 09/597,441
Elimination/reduction of black silicon in DT etch
Inventors:
Gangadhara S. Mathad, Rajiv Ranade
Patented Case
View Patent ↗
Granted: Dec 3, 2002
Filed: Jun 20, 2000
Inventors
Gangadhara S. Mathad
Rajiv Ranade
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.