Granted Patent
Utility
US 6,489,621 · App. 09/400,929
Particle beam system with a device for reducing the energy width of a particle beam
Inventor:
Jürgen Frosien
Patented Case
View Patent ↗
Granted: Dec 3, 2002
Filed: Sep 22, 1999
Inventor
Jürgen Frosien
Assignee (at issue)
Advantest Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.