Granted Patent
Utility
US 6,490,032 · App. 09/583,593
Method and apparatus for improving a dark field inspection environment
Inventors:
Hao Zhou, William D. Jimenez, Travis Smith
Patented Case
View Patent ↗
Granted: Dec 3, 2002
Filed: May 31, 2000
Inventors
Hao Zhou
William D. Jimenez
Travis Smith
Assignee (at issue)
Newport Fab, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.