Granted Patent
Utility
US 6,491,884 · App. 09/717,439
In-situ air oxidation treatment of MOCVD process effluent
Inventors:
Rebecca Faller, Mark Holst
Patented Case
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Granted: Dec 10, 2002
Filed: Nov 21, 2000
Inventors
Rebecca Faller
Mark Holst
Assignee (at issue)
ADVANCED TECHNOLOGY & MATERIALS CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.