Granted Patent
Utility
US 6,492,248 · App. 09/888,398
Few-particle-induced low-pressure TEOS process
Inventors:
Jen-Chieh Chang, Yi-Fu Chung, Ching-Cheng Hsieh, Pei-Feng Sun
Patented Case
View Patent ↗
Granted: Dec 10, 2002
Filed: Jun 26, 2001
Inventors
Jen-Chieh Chang
Yi-Fu Chung
Ching-Cheng Hsieh
Pei-Feng Sun
Assignee (at issue)
MOSEL VITELIC INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.