Granted Patent
Utility
US 6,492,284 · App. 09/907,552
Reactor for processing a workpiece using sonic energy
Inventors:
Steven L. Peace, Paul Z. Wirth, Eric Lund
Patented Case
View Patent ↗
Granted: Dec 10, 2002
Filed: Jul 16, 2001
Inventors
Steven L. Peace
Paul Z. Wirth
Eric Lund
Assignee (at issue)
Semitool, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.