Granted Patent
Utility
US 6,493,645 · App. 09/481,770
Method for detecting and classifying scratches occurring during wafer semiconductor processing
Inventor:
Thomas Hladschik
Patented Case
View Patent ↗
Granted: Dec 10, 2002
Filed: Jan 11, 2000
Inventor
Thomas Hladschik
Assignee (at issue)
Infineon Technologies North America Corp.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.