Granted Patent
Utility
US 6,495,055 · App. 09/337,735
Variable time etching system according to the accumulated number of devices being processed and a method for etching in the same manner
Inventors:
Jung-Taek Lim, Sung-Joon Byun, Soo Won Lee, Jin-Soo Kim
Patented Case
View Patent ↗
Granted: Dec 17, 2002
Filed: Jun 22, 1999
Inventors
Jung-Taek Lim
Sung-Joon Byun
Soo Won Lee
Jin-Soo Kim
Assignee (at issue)
SAMSUNG DISPLAY CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.