Granted Patent
Utility
US 6,495,415 · App. 10/027,532
Method for fabricating a patterned layer
Inventors:
Walter Hartner, Igor Kasko, Volker Weinrich, Frank Hintermaier, Gunther Schindler, Hermann Wendt
Patented Case
View Patent ↗
Granted: Dec 17, 2002
Filed: Dec 26, 2001
Inventors
Walter Hartner
Igor Kasko
Volker Weinrich
Frank Hintermaier
Gunther Schindler
Hermann Wendt
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.