Granted Patent
Utility
US 6,495,463 · App. 09/407,472
Method for chemical mechanical polishing
Inventor:
David G. Halley
Patented Case
View Patent ↗
Granted: Dec 17, 2002
Filed: Sep 28, 1999
Inventor
David G. Halley
Assignee (at issue)
Strasbaugh
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.