Granted Patent
Utility
US 6,495,476 · App. 09/642,939
Method for preventing native oxide growth during nitridation
Inventors:
Cheng-Che Lee, Chung-Chih Liu
Patented Case
View Patent ↗
Granted: Dec 17, 2002
Filed: Aug 22, 2000
Inventors
Cheng-Che Lee
Chung-Chih Liu
Assignee (at issue)
Promos Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.