IP Library Granted Patent US 6,495,802
Granted Patent Utility
US 6,495,802 · App. 09/871,854

Temperature-controlled chuck and method for controlling the temperature of a substantially flat object

Inventors: John Maltabes, Alain Charles, Karl Mautz
Patented Case View Patent ↗
Granted: Dec 17, 2002 Filed: May 31, 2001
Inventors
John Maltabes
Alain Charles
Karl Mautz
Assignee (at issue)
Motorola, Inc.

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Quick Facts
Patent No.
US 6,495,802
App. No.
09/871,854
Filed
2001-05-31
Granted
2002-12-17
Kind
B1