Granted Patent
Utility
US 6,495,963 · App. 09/673,081
Inductive coil assembly having multiple coil segments for plasma processing apparatus
Inventor:
Paul Bennett
Patented Case
View Patent ↗
Granted: Dec 17, 2002
Filed: Mar 29, 2001
Inventor
Paul Bennett
Assignee (at issue)
Trikon Holdings Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.