Granted Patent
Utility
US 6,496,306 · App. 09/364,382
Catadioptric optical system and exposure apparatus having the same
Inventors:
David Shafer, Helmut Beierl, Gerhard Furter, Karl-Heinz Schuster, Wilhelm Ulrich
Patented Case
View Patent ↗
Granted: Dec 17, 2002
Filed: Jul 29, 1999
Inventors
David Shafer
Helmut Beierl
Gerhard Furter
Karl-Heinz Schuster
Wilhelm Ulrich
Assignee (at issue)
Carl Zeiss Stiftung
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.