Granted Patent
Utility
US 6,496,351 · App. 09/822,128
MEMS device members having portions that contact a substrate and associated methods of operating
Inventors:
Edward A. Hill, Ramaswamy Mahadevan
Patented Case
View Patent ↗
Granted: Dec 17, 2002
Filed: Mar 30, 2001
Inventors
Edward A. Hill
Ramaswamy Mahadevan
Assignee (at issue)
JDS Uniphase Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.