Granted Patent
Utility
US 6,496,528 · App. 09/895,664
Line narrowing unit with flexural grating mount
Inventors:
Clay C. Titus, William G. Hulburd, Raymond F. Cybulski, John M. Algots, Michael Lysik
Patented Case
View Patent ↗
Granted: Dec 17, 2002
Filed: Jun 29, 2001
Inventors
Clay C. Titus
William G. Hulburd
Raymond F. Cybulski
John M. Algots
Michael Lysik
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.