Granted Patent
Utility
US 6,496,749 · App. 09/413,467
Semiconductor producing apparatus and temperature control method therefor
Inventors:
Hideto Yamaguchi, Kazuo Tanaka, Kenzo Urabe
Patented Case
View Patent ↗
Granted: Dec 17, 2002
Filed: Oct 6, 1999
Inventors
Hideto Yamaguchi
Kazuo Tanaka
Kenzo Urabe
Assignee (at issue)
KOKUSAI ELECTRIC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.