Granted Patent
Utility
US 6,496,959 · App. 09/616,947
Method and system for estimating plasma damage to semiconductor device for layout design
Inventor:
Ko Noguchi
Patented Case
View Patent ↗
Granted: Dec 17, 2002
Filed: Jul 14, 2000
Inventor
Ko Noguchi
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.